Only specific inorganic species exhibit an FTIR spectrum (for example: yes: silicates, carbonates, nitrates and sulfates no: titinia, oxides, etc.).Firstly, limited surface sensitivity (typical limit of detection is a film thickness of 100 nm).Can be quantitative with appropriate standards and uniform sample thicknesses.Rule-of-thumb: if you can see the sample by eye, it most likely can be analyzed. Minimum (limit of detection) analysis area: ~15-50 µm.Ambient conditions (vacuum is not necessary applicable for semi-volatile compounds).Extensive spectral libraries for compound and mixture identifications.Capable of identifying organic functional groups and often specific organic compounds.Lastly, quantification of O i in Si wafers and H in SiN, SiON and a-Si thin films (Si-H vs.particles, residues) on the macro and micro scales Secondly, identification of organic contaminants (e.g.Firstly, characterization and identification of complex mixtures of materials, including gases, liquids and solids.In addition to typical sample preparation methods (such as micro-extraction, dilution, KBr pellet and mulling techniques), EAG also utilizes various Attenuated Total Reflectance (ATR) accessories, which allows insoluble or multi-layer samples to be examined directly. FTIR is part of the SMART chart series and is shown above with Raman, which is a complementary techniqueįTIR measures the absorbance of infrared light by a sample and generates a spectrum based on the functional groups in the material.
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